Combining dynamic modelling codes with medium energy ion scattering measurements to characterise plasma doping
نویسندگان
چکیده
منابع مشابه
Direct observation and theory of trajectory-dependent electronic energy losses in medium-energy ion scattering.
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ژورنال
عنوان ژورنال: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
سال: 2017
ISSN: 0168-583X
DOI: 10.1016/j.nimb.2017.05.043